Innovation and Partnerships Office

Compact RF-Matching Network for Ion Beam Applications IB-1581

E.O. Lawrence Berkeley National Laboratory

APPLICATION OF TECHNOLOGY:

  • Focused ion beams
  • Compact plasma sources

ADVANTAGES:

  • Compact
  • Works with high RF power loads
  • Shields external electronics from RF radiation

ABSTRACT:

The new compact rf-matching network developed by Ka-Ngo Leung and colleagues at Berkeley Lab matches the plasma load to the impedance of the coaxial transmission line and output impedance of the RF amplifier at radio frequencies. Its compact size allows it to fit in the depression present on existing commercial focused ion beam systems. It is capable of operating with at least 200 Watts of continuous wave RF power. Berkeley Lab’s new RF-matching network also shields much of the RF radiation from escaping into the surrounding environment, reducing noise in external electronics.

STATUS: Issued Patent # 7,298,091. Available for licensing in specific fields of use

REFERENCE NUMBER: IB-1581