Types of Technologies Lithography Advanced Manufacturing Methods Microelectronics Devices Deposition and Lithography Methods Improved Mask Absorber for Extreme Ultraviolet Lithography (2019-058) This invention is a method for producing EUV masks with improved absorber layers, crucial for fabricating semiconductor devices with node patterning of 7 nm and … [Read more...] about Microelectronics Technologies
Semiconductor Tech
Sequence-Defined Polypeptoids for Area-Selective Deposition for Reducing Edge Placement Error in Semiconductor Fabrication 2023-047
APPLICATIONS OF TECHNOLOGY: Applications that relate to advanced semiconductor fabrication, such as: Advanced lithography for advanced semiconductor devices, such as for sub-5 nm node chips High density interconnects for advanced microelectronic devices BENEFITS: Faster growth in a single deposition cycle compared to other methods Minimal to no lateral … [Read more...] about Sequence-Defined Polypeptoids for Area-Selective Deposition for Reducing Edge Placement Error in Semiconductor Fabrication 2023-047
Unary Single Flux Quantum (U-SFQ) Architecture for Scaling Superconducting Accelerators 2021-112
APPLICATIONS OF TECHNOLOGY: Applications that require high performance computing or high performance digital communications, such as: Artificial intelligence/Machine learning Image and video processing Digital signal processing Infrared sensors Space exploration equipment Quantum technology BENEFITS: Better performance and lower power/energy … [Read more...] about Unary Single Flux Quantum (U-SFQ) Architecture for Scaling Superconducting Accelerators 2021-112
A Novel Design Method for On-Chip Superconducting Networks Using Race Logic 2021-009
APPLICATIONS OF TECHNOLOGY: Quantum Computing High performance computing (HPC) Machine learning National security computing BENEFITS: Implements both data and control paths using race logic Increases device performance per unit area Produces higher throughput per port per Josephson Junction compared to best performing state of the art on-chip … [Read more...] about A Novel Design Method for On-Chip Superconducting Networks Using Race Logic 2021-009
Improved Mask Absorber for Extreme Ultraviolet Lithography 2019-058
APPLICATIONS OF TECHNOLOGY: Extreme ultraviolet (EUV) masks for EUV-made semiconductors BENEFITS: The alloy used can be controllably patterned by plasma processing via a newly discovered self-passivation mechanism of chromium Materials are easily etchable Process has very high material selectivity BACKGROUND: The fabrication of the mask absorber is a … [Read more...] about Improved Mask Absorber for Extreme Ultraviolet Lithography 2019-058