APPLICATION OF TECHNOLOGY:
- Neutron tubes
- Ion implantation
ADVANTAGES:
- Low extraction voltage
- No beam impingement on the high-voltage electrodes
- Beam current enhanced by merging multiple beamlets
- Can be applied to positive or negative beams
ABSTRACT: An extraction system, developed by Ka-Ngo Leung of Berkeley Lab, uses low voltage to extract multiple small beams, or beamlets, of ions from a multicusp plasma source through either holes or slots. It is comprised of a plasma electrode, an extraction electrode, and acceleration (high-voltage) electrodes. Both plasma and extraction electrode use multiple apertures while the acceleration electrode contains only a single aperture. After extraction, the beamlets merge together to form a single large beam, enhancing beam current. This larger beam is then accelerated to higher energies and forms a parallel or a divergent beam.
STATUS: Available for licensing
REFERENCE NUMBER: IB-1617