APPLICATIONS OF TECHNOLOGY: Extreme ultraviolet (EUV) masks for EUV-made semiconductors BENEFITS: The alloy used can be controllably patterned by plasma processing via a newly discovered self-passivation mechanism of chromium Materials are easily etchable Process has very high material selectivity BACKGROUND: The fabrication of the mask absorber is a … [Read more...] about Improved Mask Absorber for Extreme Ultraviolet Lithography 2019-058
Semiconductor Tech
First Diode for Thermal Management of Micro and Macro Devices IB-2336
APPLICATIONS OF TECHNOLOGY: Thermal management for: microelectronic devices solar cells and solar energy management systems refrigerators hybrid biological/inorganic systems nanoscale calorimeters Information transport and processing Molecular motors ADVANTAGES: First solid state device to direct heat flow Initial tests demonstrate … [Read more...] about First Diode for Thermal Management of Micro and Macro Devices IB-2336