Tag: Semiconductor and Other Manufacturing

Extreme Ultraviolet Lithography Tools IB-2468, IB-2469, IB-2476, IB-2477, IB-2478, IB-2479

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Source for High Brightness Multiple Beamlets IB-2197

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Ion Beam Extractor with Counterbore IB-1780

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Cathodic Arc Plasma System with Twist Filter: Miniaturized Cathodic Arc Plasma Source IB-1497

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Cathodic Arc Plasma System with Twist Filter – Triggerless Method of Cathodic Arc Initiation IB-1489

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Cathodic Arc Plasma System with Twist Filter: Advanced Macroparticle Twist Filter, Magnetic Expander and Homogenizer for Cathodic Arc Plasmas IB-1484

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Universal Pattern Generator for Micro-Ion Beam Reduction Lithography IB-1387

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High Current Focused Ion Beam System IB-1217

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